Observations of a mode transition in a hydrogen hollow cathode discharge using phase resolved optical emission spectroscopy
نویسندگان
چکیده
منابع مشابه
Analysis of organic compounds by particle beam/hollow cathode atomic emission spectroscopy: determinations of carbon and hydrogen in amino acids.
A detailed evaluation of the analytical characteristics of a particle beam/hollow cathode glow discharge atomic emission spectroscopy (PB/HC-AES) system is described for applications in the area of organic sample analysis. The optimization of sample introduction, nebulization parameters, and glow discharge conditions was performed for the elemental analysis (focusing on C and H) of a group of a...
متن کاملHollow cathode sustained plasma microjets: Characterization and application to diamond deposition
Extending the principle of operation of hollow cathode microdischarges to a tube geometry has allowed the formation of stable, high-pressure plasma microjets in a variety of gases including Ar, He, and H2 . Direct current discharges are ignited between stainless steel capillary tubes (d 5178 mm) which are operated as the cathode and a metal grid or plate that serves as the anode. Argon plasma m...
متن کاملTime-resolved pinhole camera imaging and extreme ultraviolet spectrometry on a hollow cathode discharge in xenon.
A pinhole camera, an extreme ultraviolet (EUV) spectrometer, a fast gatable multichannel plate EUV detector, and a digital camera have been installed on the ASML EUV laboratory setup to perform time-resolved pinhole imaging and EUV spectroscopy on a copy of the Philips EUV hollow cathode discharge plasma source. The main properties of the setup have been characterized. Time-resolved measurement...
متن کاملPseudospark Switches (pss) for Pulsed Power Applications
Basing on the pseudospark discharge, a low pressure gas discharge in a special geometry, fast closing switches for different pulsed power applications have been designed. Medium power PSS (< 30 kA peak current) were used in laser circuits whereas high current PSS are tested successfully in high current pulsed power applications (< 200 kA). For currents of a few kA the discharge is supported by ...
متن کاملOptical emission spectroscopy to diagnose powder formation in SiH4-H2 discharges
Silane and hydrogen discharges are widely used for the deposition of silicon thin film solar cells in large area plasmaenhanced chemical vapor deposition reactors. In the case of microcrystalline silicon thin film solar cells, it is of crucial importance to increase the deposition rate in order to reduce the manufacturing costs. This can be performed by using high silane concentration, and usua...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2014